JPH0324249U - - Google Patents

Info

Publication number
JPH0324249U
JPH0324249U JP8431289U JP8431289U JPH0324249U JP H0324249 U JPH0324249 U JP H0324249U JP 8431289 U JP8431289 U JP 8431289U JP 8431289 U JP8431289 U JP 8431289U JP H0324249 U JPH0324249 U JP H0324249U
Authority
JP
Japan
Prior art keywords
insulator
sample stage
container
plasma generation
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8431289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8431289U priority Critical patent/JPH0324249U/ja
Publication of JPH0324249U publication Critical patent/JPH0324249U/ja
Pending legal-status Critical Current

Links

JP8431289U 1989-07-17 1989-07-17 Pending JPH0324249U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8431289U JPH0324249U (en]) 1989-07-17 1989-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8431289U JPH0324249U (en]) 1989-07-17 1989-07-17

Publications (1)

Publication Number Publication Date
JPH0324249U true JPH0324249U (en]) 1991-03-13

Family

ID=31632696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8431289U Pending JPH0324249U (en]) 1989-07-17 1989-07-17

Country Status (1)

Country Link
JP (1) JPH0324249U (en])

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